Ceramic & Quartz
本公司可提供下列系列之设备原厂全新零组件:
| Material | OEM PN | Description |
| Quartz | 0200-01903 | AMAT Insulator Pedestal Quartz 300mm PCII |
| AL2O3 | 0200-07442 | INSULATOR, 300MM SOURCE ADAPTOR, CERAMIC Al2O3 |
| Quartz | 0020-21664 | INSULATOR SOURCE 8 INCH |
| Al2O3 | 0020-22975 | INSULATOR Tin8in WAFER 0020-22 |
| Al2O3 | 0021-84015 | ALUMINUM RING |
| Quartz | 0040-21178 | 8 INCH BELL JAR |
| Al2O3 | 0200-00137 | FOCUS RING(UMC) |
| Quartz | 0200-00221 | QUARTZ INSULATOR 0200-00221 |
| Al2O3 | 0200-00247 | CAPTURE RING DPS METAL |
| Al2O3 | 0200-03447 | CAPTURE RING DPS METAL |
| Al2O3 | 0200-00250 | RING CAPTURE |
| Al2O3 | 0200-00296 | SLEEVE JUNCTION |
| Quartz | 0200-00406 | BUSHING PEDESTAL PC II 0200-00 |
| Al2O3 | 0200-00621 | WXZ SHADOW RING |
| Al2O3 | 0200-00969 | PUMPING LINER FGS TEOS |
| AL2O3 | 0200-01347 | DOME TOP FEED 300MM HDPCVD ULT |
| Al2O3 | 0200-01798 | PIN LIFT TXZ HEATER |
| Al2O3 | 0200-02577 | LIFT PLATE FIXED LIFT |
| Al2O3 | 0200-02646 | INJECTOR GAS 12 HOLES .020 IDA. .68LG |
| Al2O3 | 0200-02647 | INJECTOR GAS 15 HOLES .020 IDA. .68LG |
| Al2O3 | 0200-03312 | HOOP LIFT 140 FXD FLOAT |
| Al2O3 | 0200-03313 | RING FLOATING FXD-FLOAT |
| Al2O3 | 0200-03314 | 12 INCH PRODUCER LIFT PIN |
| Al2O3 | 0200-03405 | PUMPING LINER TOP PRODUCER SE |
| AL2O3 | 0200-03691 | INSULATOR EXTERNAL W/LIP |
| AL2O3 | 0200-05590 | DOME TOP FEED 300MM HDPCVD ULT |
| Al2O3 | 0200-05623 | PUMPING RING |
| AL2O3 | 0200-05664 | COLLAR,ESC 300MM,MIN.CONTACT HDPCVD |
| AL2O3 | 0200-06824 | COVER RING, 300MM HDPCVD, ULTIMAX |
| AL2O3 | 0200-07238 | INSULATOR EXTERNAL |
| AL2O3 | 0200-07359 | INSULATOR, INTERNAL |
| AL2O3 | 0200-07514 | INSULATOR,300MM SOURCE ADAPTOR,CERAMIC |
| Quartz | 0200-07524 | QTZ RING, TWO STEPS, PRODUCER ETCH |
| AL2O3 | 0200-08301 | DEPO RING |
| Al2O3 | 0200-09072 | SHIELD CERAMIC 200MM/WSIX |
| Quartz | 0200-09606 | COVER RING 0200-09606 |
| Al2O3 | 0200-09757 | CLAMP RING |
| Al2O3 | 0200-09950 | I SOLATOR EC LID WXZ |
| Al2O3 | 0200-09974 | PUMPING INSERT |
| Quartz | 0200-10073 | QUARTZ INSULATOR |
| Al2O3 | 0200-10143 | INSERT RING CHAMBER DXZ |
| Al2O3 | 0200-10144 | ISOLATOR PUMPING PLATE DxZ |
| Al2O3 | 0200-10157 | LINEAR JUNCTION SIN DXZ |
| Al2O3 | 0200-10160 | LINER CERAMIC DXZ DCVD |
| Al2O3 | 0200-10163 | ISOLATOR SIN ENHANCED PUMPING |
| Al2O3 | 0200-10164 | SHIELD PUMPING INSERT SIN DXZ |
| Al2O3 | 0200-10169 | PLATE EDGE COVER AL2O3 |
| Al2O3 | 0200-10324 | DPS METAL DOME |
| Si | 0200-10446 | INSERT RING SILICON 200MM NOTC |
| Al2O3 | 0200-10650 | COVER CERAMIC PUMPING CHANNEL |
| Al2O3 | 0200-10960 | ISOLATER |
| Al2O3 | 0200-10961 | PUMPING RING |
| Al2O3 | 0200-18081 | COVER LOW PROFILE HDP-CVD ULT |
| Al2O3 | 0200-18090 | INSULATOR CLAMPLESS IN-SITU TE |
| AL2O3 | 0200-18826 | LID, WIDE, 23.5DIA, C3 |
| AL2O3 | 0200-18941 | SHIELD,RADIATION,HEATER,PREC |
| Quartz | 0200-20055 | INSULATOR QTZ 8in PRECLEAN II |
| AL2O3 | 0200-20285 | COVER, 8" PEDESTAL, B101 HTR, CERAMIC, VECTRA-IMP |
| Quartz | 0200-20426 | INSULATOR PINLESS QTZ 8in SNNF |
| Al2O3 | 0200-26254 | CERAMIC INSULATOR |
| Al2O3 | 0200-35290 | HOUSING GAS FEED DPS MEC CHAM |
| Al2O3 | 0200-35291 | HOUSING GAS NOZZLE DPS MEC |
| Al2O3 | 0200-35842 | PUMPING RING CERAMIC C SHAPE G |
| Al2O3 | 0200-35843 | PUMPING RING CERAMIC TOP GIGA |
| Al2O3 | 0200-36415 | C-RING FOR DXZ CENTURA SABP |
| Al2O3 | 0200-36416 | PUMPING RING FOR DXZ CENTURA |
| Al2O3 | 0200-36417 | PUMPING RING FOR DXZ 0200-3641 |
| Al2O3 | 0200-36418 | CERAMIC COVER 0200-36418 |
| ALN | 0200-36629 | 6 INCH COVER PLATE |
| ALN | 0200-36630 | COVER PLATE HEATER DxZ AIN |
| AlN | 0200-36631 | COVER PLATE DIHPLE 0200-36631 |
| Al2O3 | 0200-36649 | LIFT RING |
| Al2O3 | 0200-36666 | ISOLATOR CERAMIC FOR PRODUCER |
| Quartz | 0200-36696 | SHADOW RING |
| Al2O3 | 0200-39137 | DPS POLY DOME |
| Al2O3 | 0200-39140 | RING FOCUS 195MM SEMI NOTCH N |
| Al2O3 | 0200-39274 | PUMPING RINGCERAMIC GIGA FILL |
| Al2O3 | 0200-39289 | ISOLATOR PUMPING RING TEOS |
| Al2O3 | 0200-39324 | CHAMBER INSERT CERAMIC |
| Al2O3 | 0200-39361 | ISOLATOR PUMPING RING SILANE |
| Quartz | 0200-76068 | SHADOW RING QUARTZ 150MM DIA 5 |
| Quartz | 1805-220135-13 | RING EXT OUTER |
| Quartz | 1805-220159-13 | RING SHIELD |
| Quartz | 1805-220177-11 | SHIELD RING |
| Quartz | 1805-220177-12 | RING SHIELD (HARS-LD) |
| Quartz | 1805-320102-12 | COVER RING |
| Quartz | 1805-320103-12 | BASE RING COOLING F/R |
| Quartz | 1805-320104-11 | HOLDER RING |
| Quartz | 1805-320109-11 | COVER RING(OUTER) |
| Quartz | 1805-320110-21 | INNER RING |
| Quartz | 1805-320126-21 | COVER RING |
| Quartz | 1805-320139-11 | BASE RING |
| AL2O3 | 1810-121499-22 | SHELTER RING 1810-121499-22 |
| Quartz | 1810-222191-11 | TEL FOCUS RING |
| AL2O3 | 1810-222443-11 | INNER RING |
| Quartz | 1810-223376-11 | FOCUS RING |
| AL2O3 | 1810-223596-11 | RING CERAMIC SHIELD RING T7 |
| AL2O3 | 1810-224511-11 | RING FOCUS M |
| Quartz | 1810-224633-11 | SHIELD RING |
| SS | 1810-225123-11 | FOCUS RING |
| AL2O3 | 1810-32807012 | RING BELLOWS KC-145 |
| SS | 1810-329156-11 | FOCUS RING |
| Quartz | 1D05-300052-13 | INSULATOR RING A7 QUARTZ |
| SS | 1D10-302209-14 | FOCUS RING SILICON |
| AL2O3 | 1D10-302209-15 | FOCUS RING |
| AL2O3 | 1D10-304010-12 | SHIELD RING B3 CERAMIC |
| AL2O3 | 1D10-309823-11 | CERAMIC A8 RING |
| AL2O3 | 1D10-309946-11 | FOCUS RING |
| Si | 1D10-309946-11 | FOCUS RING 1D10-309946-11/12 |
| Si | 1D10-309946-12 | FOCUS RING 1D10-309946-11/12 |
| 2L05-250034-11 | RING,SHIELD TOP-H(PH-TU) V2 | |
| AL2O3 | 2L05-350037-Z1 | COVER RING 360.9 Q V |
| AL2O3 | 2L10-256006-12 | RING,CEL-HOLDER LD-OUTER DC2 |
| AL2O3 | 2L10-256033-11 | RING,CEL-HOLDER LD-INNER DC2 |
| Quartz | 3D05-200094-12 | SHIELD RING QZ TEL 300 |
| Quartz | 3D05-300007-23 | INSULATOR RING |
| Quartz | 3D05-300142-13 | Insulator ESC Enclosure |
| Quartz | 3D05-300243-11 | COVER RING360.9 TE |
| Quartz | 3D05-350010-11 | COVER RING 360-364LT 8.6T |
| AL2O3 | 3D05-350010-Z1 | COVER RING 360-364LT 8.6T |
| AL2O3 | 3D10-201053-13 | INSULATOR,UPPER (T28-BIG UEL) |
| AL2O3 | 3D10-202405-13 | INSULATOR,LOWER T32-R6-BL-NC |
| AL2O3 | 3D10-250355-11 | HOLDER,INSULATOR TYPE-SB |
| AL2O3 | 3D10-250864-11 | FOCUS RING BASE,297-T2.65 COOL |
| AL2O3 | 3D10-251223-V1 | BASE,FOCUS RING 297.6-T2.65 3P |
| AL2O3 | 3D10-251356-12 | INSULATOR,LOWER RE FC2 |
| AL2O3 | 3D10-251451-Z100 | FOUCS RING |
| AL2O3 | 3M10-254112-21 | RING,STAGE OUTER |
※如有需求，請洽公司人員詢問。